
The dynamic stability of GaN-on-Si HEMTs with different substrate connections is a critical for understanding the device reliability and designing the substrate bias management circuits for monolithic bidirectional switches. Prior studies have mainly focused on dynamic on-resistance (RON) characterization using pulse I–V or single-pulse double-pulse tests, which deviate from practical operating conditions. In addition, dynamic threshold voltage (VTH)—essential to understanding RON shifts—has rarely been evaluated under different substrate conditions. This work presents a circuit test platform enabling in-situ characterization of dynamic RON, dynamic VTH, and substrate bias under steady-state hard-switching. Using this setup, GaN-on-Si HEMTs are tested under source-connected, drain-connected, and floating substrate configurations. Under the floating-substrate condition, we find the substrate bias exhibits …